Copper Electroplating
Copper films and resist-defined structures on conductive seed layers.
- Wafer size
- Up to 4"
- Thickness
- 2 – 30 µm
- Temperature
- 25 °C
- Aspect ratio
- ≤ 15
- Cu
- Cr/Cu
- Continuous seed and electrical contact required
- Thickness uniformity set by pattern density
- Thickness limit: mold height; overplating: wider features
Materials and thickness
| Material | Thickness per run | Use and notes |
|---|---|---|
| Cu | 2–30 µm | Plated metal Pattern density and exposed area affect thickness uniformity. |
Full specifications
- Substrates
- Seeded Si, glass, sapphire, ceramics and bath-compatible bulk metals.
- Sample size
- Pieces to 100 mm wafers with accessible electrical contacts.
- Materials
- Cu on a continuous conductive seed; Cr/Cu is a seed option.
- Process temperature
- 25 °C.
- Thickness range
- 2–30 µm.
- Minimum feature
- Minimum feature depends on mold width, depth, spacing and exposed area.
- Resolution
- Aspect ratio up to 15, depending on mold geometry and exposed area.
- CMOS compatibility
- Separate metal-processing flow; excluded from front-end CMOS-clean processing.
- Continuous seed coverage and electrical contact are required across every region to be plated.
- Pattern density and exposed area affect thickness uniformity.
- Mold height limits deposit thickness; overplating widens features beyond the mold edge.
- Exposed seed between features requires removal unless electrical connections are intentional; seed etching must preserve the plated structures.