Blade Dicing
Wafer and piece separation along a supplied street map.
- Wafer size
- Up to 4"
- Si/glass blade
- 40 – 100 µm
- Cut loss
- ≈80 – 120 µm
- Routine die
- ≥ 2 × 2 mm
- Si
- Sapphire
- Glass
- Quartz
- Dicing tape
- Clear streets for kerf, chipping and alignment
- Water, debris and loading: sensitive-structure damage risk
- Tape retention limits: backside films and small dies
Full specifications
- Substrates
- Si, sapphire, glass and quartz.
- Sample size
- Pieces to 100 mm wafers; 150 mm requires compatible mounting and blade clearance.
- Kerf
- Si/glass blades: 40–100 µm; effective material loss including chipping: about 80–120 µm.
- Minimum die size
- Routine dies: at least 2 × 2 mm; smaller dies require secure mounting and pickup.
- Mounting
- Dicing tape on a frame; tape adhesion and release must suit die size and backside films.
- Process temperature
- Near-ambient, water-cooled cutting; protective-coating bakes are separate.
- Kerf, chipping and alignment allowances require clear streets; cuts extend across the sample.
- Glass, quartz and sapphire chip differently from silicon; allow material-specific edge clearance.
- Water, debris and mechanical loading can damage sensitive structures; specify protective coatings and cleaning needs.
- Backside metals, adhesives and very small dies limit tape retention and clean release.